Application of stainless steel tubes in semiconductor industry
Stainless steel tubes, especially high-purity seamless stainless steel tubes (316L, 316L EP, BA), are an indispensable key base material in semiconductor manufacturing plants (Fabs), mainly performing the tasks of transporting ultrapure gases, chemicals and ultrapure water.
Semiconductor chip production is extremely sensitive to contamination:
1. Particle pollution
2. Metal Contamination
3. Moisture pollution
4.Contamination with organic matter (TOC)
Even nanometer-level impurities can lead to failure of the entire wafer.
Therefore, the transportation system must have:
1.Ultra-high purity
2.Extremely low emission of impurities
3.Corrosion resistance
4.No particle formation
5.The ability for long-term stable work
And electro-polished (EP) 316L stainless steel tubes are now the mainstream solution.
Main application scenarios:
1.Special gas supply systems
2. Ultrapure water systems
3. Chemical supply systems
4.Vacuum systems
Stainless Tubing Standards Widely Used in the Semiconductor Industry
| Name | Standard |
| Material | 316L |
| Standard | ASTM A269 |
| Ultra high purity standard | SEMI F20 |
| Surface treatment | B.A., E.P. |
| Roughness | Ra ≤ 0.25 µm |
| Welding method | Orbital welding |
| Cleanliness class | Class 100 / ISO 5 |
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